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产品描述
TC10-HHH型振镜是我司推出的一款超高性能型产品:具有超快的速度、超高的精度、稳定性好、抗干扰能力强等特点，综合性能达到国内外同类型产品超高端技术水准。
TC10-HHH galvanometer is a super-high performance product which our company has introduced. It has the characteristics of super-fast speed, super-high precision, good stability and strong anti-jamming ability. Its comprehensive performance has reached the super-high-end technical level of similar products at home and abroad.
应用领域 Application area
微加工 Micromachining
标记、标刻 Marking and marking
医疗 Medical care
光学扫描、飞行打标 Optical scanning and flying marking
| 扫描电机参数 Scan Motor Specifications | TC10-HHH |
| 非线性度 Nonlinearity | < 2 mrad / 44° |
| 1%满行程阶跃响应时间 1% of full scale | ≤0.4ms |
| 跟踪误差时间 Tracking error | 0.15ms |
| 增益漂移 Gain error | <20PPM/K |
| 零点漂移 Zero offset | <8μRad./℃ |
| (预热30分钟后)老化漂移(8H) (after 30 min warm-up )Long-term drift(8H) | <0.15mRad |
| 重复精度 Repeatability | < 10μRad |
| 打标速度 Marking speed | 6500mm/s |
| 定位速度 Positioning speed | 15m/s |
| 扫描角度 Typical scan angle | ±0.35rad |
| 分辨率 Positioning resolution | 10μRad |
| 镜片型号(nm) Reflection wavelength(nm) | 10600/1064/532/355 |
| 电源要求 Power Requirements | ±15VDC,max3A each |
| 通光孔径 Aperture | 10.0mm |
| 工作温度 Operating temperature | 25℃±10℃ |
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